Our Calibration Grid is designed for calibration of nano scale surface charactherizastion system such as Atomic Force Microscope, Scanning Electron Mictroscope, Optical Profilometer, Stylus Profilometer.
The Calibration grid has 3 different and separated areas. 6 µm, 10 µm and 20 µm. Each area Consist of line ,grating ,circle structures.
The surface coated with SiO₂ over Si substrates.
SPECIFICATION OF CALIBRATION GRID
