OPT-RTP1000 RTP Tube Furnace



Starting From 45.000$ for 200 mm OD

Starting From 55.000$ for 300 mm OD

OPT-RTP 1000 RTP Tube Furnace

OPT-RTP1000 Rapid Thermal Processing Tube Furnace a splitable furnace with 3 hot zones and with  halogen heating element for fast heating with plasma generetor

Technical Parameters

  1. Furnace Part
Display LCD Touch Screen
Chamber Split chamber
 Display 7″ Windows based LCD Touch Screen
Continuous Working Temp. ≤900℃
Heating Rate ≤80℃/S
Hot Zone 300+300+300 mm   3 Zones can be set independently.
Tube Size 250*2500mm approx. OD*L

Actual length depends on final design

Tube material High purity quartz
Chamber Material Alumina fiber

Vacuum Flange

Stainless steel vacuum flange, one side is with needle valve and mechanical pressure meter, the other side is with KF port
Heating Element Halogen lamp x 3 pcs


Holder Stainless Steel Holder

Suitable for 3pcs solar cell samples (210*210mm)

Thermocouple K type x 3pcs
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Power 380V, 50 Hz, three phases Actually power depends on our final design.

2. Plasma Unit

Plasma RF Power Supply Output Power: 5 -500W adjustable with ± 1% stability.
RF frequency: 13.56 MHz ±0.005% stability.
Reflection Power: 200W max.
Matching: Automatic under 3 sec
RF Output Port: 50 Ω, N-type, female
Noise: <50 dB.
Cooling: Air cooling.
Power: 208-240VAC, Single Phase, 50/60Hz
Coil : Suitable to use with 250 mm OD Tubes
Power protection Over current protection, Over temperature

protection, reflect power protection

Control model PLC/RS232\485

Internally piloting/PLC analog quantity/RS232/485 communication

3.Vacuum Pump and Water Chiller

 Diffusion Pump System Rotary vane vacuum pump + diffusion pump+composite digital vacuum gauge

Support furnace tube inside to reach 10-2 torr vacuum level

 Water Chiller Used for above diffusion pump system

4. Mobile Inverted Microscope

Mobile microscope with 4X, 10X and 40X Objectives

Can be integrated to any smartphone

Inverted type (Illuminated from the top side)