Compact Spin Coater (500-8000 rpm, 4“ wafer Max.) with 3 Sets of Vacuum Chucks & Complete Accessories – VTC-100A


VTC-100A is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4″. The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use. The latest versions have the vacuum chuck and liquid disk made of Polypropylene (PP).

Structure • Aluminum casting case to keep spinning stable
• Liquid disk made of Polypropylene (PP) to resist most of corrosive solutions
• Drainage outlet and vacuum pump connector are on back panel
• One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump
• One oil-less vacuum pump is included in the standard package, please click here for specification details.
Vacuum Chuck • 3 sets of PP anti-corrosive vacuum chucks come in different sizes (1”, 2” and 4”)
• 1 piece of adhesive tape (6” W x 24” L) is included for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)
• Mini suction cups are available for small wafer with less 1″ dia. or substrate with regular ( 5×5, or 10x10mm)or irregular shape. Please click here to order. at extra cost. ( see picture below right )exhuast filter is included
Spin Speed • Digital control panel with two programmable segments of different spin times (1~60s) and speeds
• 500 – 8000 RPM adjustable spining speed
Liquid Injecting • 20mL syringe is used to contain the coating material. (see the first picture below)
• The syringe holder height can be adjusted and rotated freely along the support rod.
• Optional:
o You may choose Precision Electronic Single Channel Pipette: 20 – 200uL for more accurate coating
o Using plasma-cleaner to treat substrate surface before coating can improve film quality
Input Power 110VAC or 220VAC please select the voltage in option bar.
Motor Power 150 W
Product Dimensions 13”(L) x 10”(W) x 8.5”(H)
Net Weight 15 kg (33 lbs)
Compliance CE Certified
Warranty • One year limited with lifetime support
• Rusting and damage due to improper storage condition or maintenance is not covered by warranty
Shipping Dimensions 40″(L) x 28″(W) x 24″(H)
Shipping Weight 46 kg (100 lbs)