| Model | OPT-PC-2C |
| Power Supply | AC 220V 50Hz |
| RF Power | 150W |
| RF Frequency | 40 KHz |
| Float flow meter | 1 Channel |
| Current | 1.2A |
| Dimensions | 450x450x200mm |
| Weight | 15kg |
| Chamber Size | Φ100 × 270mm |
| Chamber Material | 304 stainless steel |
| Vacuum pump | Rotary Vane Vacuum Pump |
Plasma Cleaner Sputter
