Equipment Composition
The plasma cleaner consists of a reaction chamber (also called a vacuum chamber), a vacuum system, a discharge system, an electric control system, and an intake air flow control system.
This equipment adopts touch screen + PLC programmable controller, processing parameters can be set arbitrarily on the touch screen, with manual/automatic switching function. The automatic operation adopts “one-button”, and the working process is completely controlled by the computer. The manual operation is completed by the user on the manual mode interface.
Specification：
| Model | OPT-PL05 |
| Control method | PLC+touch screen |
| Power supply | AC220V（±10V）50/60Hz |
| Machine power | 1.5KW (including vacuum pump) |
| RF source power | 300W (60%-100% continuously adjustable） |
| RF source frequency | 40KHz |
| Frequency offset | less than 0.2KHz |
| Gas flow meter | 0-500ml/min (2-way gas adjustable) |
| Gas flow control | Precision needle valve float flowmeter (2 channels) |
| Process Control | Automatic and Manual |
| Cleaning time | 1-9999s adjustable |
| Vacuum degree | <80Pa |
| Vacuum pump pumping rate | 2L/S (oil mist filtration) |
| Inner chamber size (round) | φ150 (diameter)*280 (depth) mm
Material: 316 stainless steel |
| Plate Layout | Parallel Electrode Plates: Power Plate (1) + Stainless Steel Tray (1) |
| Effective processing space | W125*D235mm |
| Processing temperature | ＜60° |
| External Size | 590mm ×450mm ×460mm(长×宽×高） |
| Protection function Touch screen control | intelligent timing, quantitative, abnormal vacuum pressure alarm and other protection functions. |
| Process gas
|
A, 2-way process gas
B, flow control range C. Gas that can be introduced: argon, hydrogen, oxygen, nitrogen, air, etc. |
